Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11307489 | EUV photomask and manufacturing method of the same | Tran-Hui Shen, Ching-Hsiang Hsu | 2022-04-19 |
| 11287745 | Reticle-masking structure, extreme ultraviolet apparatus, and method of forming the same | Ching-Hsiang Hsu, James Jeng-Jyi Hwang | 2022-03-29 |
| 11260495 | Apparatus and methods for chemical mechanical polishing | Ji Cui | 2022-03-01 |
| 11255658 | Ellipsometer and method for estimating thickness of film | Chi-Ming Yang, Ching-Hsiang Hsu, Chyi Shyuan Chern | 2022-02-22 |