Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11517995 | Wet chemical heating system and a method of chemical mechanical polishing | CHIA-HSUN CHANG, Chih-Hung Chen, Liang-Guang Chen, Tzu kai Lin, Chyi Shyuan Chern +1 more | 2022-12-06 |
| 11508585 | Methods for chemical mechanical polishing and forming interconnect structure | Fu-Ming Huang, Ting-Kui Chang, Tang-Kuei Chang, Chun-Chieh Lin, Wei-Wei Liang +7 more | 2022-11-22 |
| 11450565 | Ion implant process for defect elimination in metal layer planarization | Chia-Cheng Chen, Huicheng Chang, Fu-Ming Huang, Kei-Wei Chen, Liang-Yin Chen +3 more | 2022-09-20 |
| 11260495 | Apparatus and methods for chemical mechanical polishing | Feng Yuan Hsu | 2022-03-01 |