Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11517995 | Wet chemical heating system and a method of chemical mechanical polishing | Ji Cui, CHIA-HSUN CHANG, Chih-Hung Chen, Liang-Guang Chen, Chyi Shyuan Chern +1 more | 2022-12-06 |
| 11393727 | Structure and formation method of fin-like field effect transistor | Shiu-Ko JangJian, Chi-Cherng Jeng | 2022-07-19 |
| 11387109 | CMP process and methods thereof | Che-Lun Chang, Pin-Chuan Su, Hsin-Chieh Huang, Ming-Yuan Wu, Yu-Wen Wang +1 more | 2022-07-12 |