Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11506986 | Thermal controlling method in lithography system | Chi-Ming Yang, Jui-Pin Wu, Li-Jui Chen | 2022-11-22 |
| 11490750 | Versatile tableware device | Chunming Cheng | 2022-11-08 |
| 11452197 | Shock wave visualization for extreme ultraviolet plasma optimization | Jen-Hao Yeh, Jhan-Hong YEH, Ting-Ya CHENG, Yee-Shian Henry TONG, Chun-Lin Chang +3 more | 2022-09-20 |
| 11340531 | Target control in extreme ultraviolet lithography systems using aberration of reflection image | Ting-Ya CHENG, Han-Lung Chang, Shi-Han SHANN, Li-Jui Chen | 2022-05-24 |