Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11528798 | Replacement method for droplet generator | Shih-Yu Tu, Hsiao-Lun Chang, Li-Jui Chen, Po-Chung Cheng | 2022-12-13 |
| 11470710 | EUV light source and apparatus for EUV lithography | Wei-Shin Cheng, Li-Jui Chen, Po-Chung Cheng, Hsiao-Lun Chang | 2022-10-11 |
| 11452197 | Shock wave visualization for extreme ultraviolet plasma optimization | Yen-Shuo Su, Jen-Hao Yeh, Jhan-Hong YEH, Ting-Ya CHENG, Yee-Shian Henry TONG +3 more | 2022-09-20 |
| 11437161 | Lithography apparatus and method for using the same | Chun-Lin Chang, Chieh Hsieh, Shang-Chieh Chien, Heng-Hsin Liu, Li-Jui Chen +1 more | 2022-09-06 |
| 11340531 | Target control in extreme ultraviolet lithography systems using aberration of reflection image | Ting-Ya CHENG, Shi-Han SHANN, Li-Jui Chen, Yen-Shuo Su | 2022-05-24 |