Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11340531 | Target control in extreme ultraviolet lithography systems using aberration of reflection image | Ting-Ya CHENG, Han-Lung Chang, Li-Jui Chen, Yen-Shuo Su | 2022-05-24 |
SS
Shi-Han SHANN
Overall (2022): #259,217 of 548,613Top 50%
1
Patents 2022