Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11452197 | Shock wave visualization for extreme ultraviolet plasma optimization | Yen-Shuo Su, Jen-Hao Yeh, Jhan-Hong YEH, Yee-Shian Henry TONG, Chun-Lin Chang +3 more | 2022-09-20 |
| 11340531 | Target control in extreme ultraviolet lithography systems using aberration of reflection image | Han-Lung Chang, Shi-Han SHANN, Li-Jui Chen, Yen-Shuo Su | 2022-05-24 |