Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11452197 | Shock wave visualization for extreme ultraviolet plasma optimization | Yen-Shuo Su, Jen-Hao Yeh, Ting-Ya CHENG, Yee-Shian Henry TONG, Chun-Lin Chang +3 more | 2022-09-20 |
| 11226564 | EUV light source and apparatus for lithography | Cheng-Chieh Chen, Jeng-Yann Tsay, Li-Jui Chen, Henry Yee Shian Tong, Wen-Chih Wang +1 more | 2022-01-18 |