Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11520243 | Lithography system and method thereof | Shao-Hua Wang, Chueh-Chi Kuo, Kuei-Lin Ho, Zong-You YANG, Cheng-Wei Sun +3 more | 2022-12-06 |
| 11226564 | EUV light source and apparatus for lithography | Jhan-Hong YEH, Jeng-Yann Tsay, Li-Jui Chen, Henry Yee Shian Tong, Wen-Chih Wang +1 more | 2022-01-18 |