Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11443923 | Apparatus for fabricating a semiconductor structure and method of fabricating a semiconductor structure | Keith Kuang-Kuo Koai, SHIH-KUO LIU, Hsin-Liang Chen | 2022-09-13 |
| 11244827 | Semiconductor manufacturing method and apparatus thereof | Yung-Yao Lee | 2022-02-08 |
| 11226564 | EUV light source and apparatus for lithography | Jhan-Hong YEH, Cheng-Chieh Chen, Jeng-Yann Tsay, Li-Jui Chen, Henry Yee Shian Tong +1 more | 2022-01-18 |