Issued Patents 2022
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11500299 | Exposure method and exposure apparatus | Heng-Hsin Liu, Hung-Ming Kuo, Jui-Chun Peng | 2022-11-15 |
| 11487210 | Method and system of surface topography measurement for lithography | Yeh-Chin Wang, Yang-Ann Chu, Yung-Hsiang Chen, Yung-Cheng Chen | 2022-11-01 |
| 11482417 | Method of manufacturing semiconductor structure | Chen Yi Hsu, Wei-Hsiang Tseng | 2022-10-25 |
| 11378889 | Immersion lithography system and method of using | Wei-Chih Lin, Chih-Chien Lin | 2022-07-05 |
| 11244827 | Semiconductor manufacturing method and apparatus thereof | Wen-Chih Wang | 2022-02-08 |
| 11226562 | Semiconductor structure and manufacturing method thereof | Yi-Ping Hsieh | 2022-01-18 |
| 11221564 | Method for improving exposure performance and apparatus thereof | Chao LU | 2022-01-11 |