Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11487210 | Method and system of surface topography measurement for lithography | Yung-Yao Lee, Yeh-Chin Wang, Yang-Ann Chu, Yung-Hsiang Chen | 2022-11-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11487210 | Method and system of surface topography measurement for lithography | Yung-Yao Lee, Yeh-Chin Wang, Yang-Ann Chu, Yung-Hsiang Chen | 2022-11-01 |