Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11517995 | Wet chemical heating system and a method of chemical mechanical polishing | Ji Cui, CHIA-HSUN CHANG, Chih-Hung Chen, Liang-Guang Chen, Tzu kai Lin +1 more | 2022-12-06 |
| 11454877 | Extreme ultraviolet light reflective structure including nano-lattice and manufacturing method thereof | Benny KU, Wen-Hao Cheng | 2022-09-27 |
| 11443923 | Apparatus for fabricating a semiconductor structure and method of fabricating a semiconductor structure | SHIH-KUO LIU, Wen-Chih Wang, Hsin-Liang Chen | 2022-09-13 |
| 11318506 | Apparatus for cleaning semiconductor equipment | SHIH-KUO LIU, CHIA-HSUN CHANG, Wai Hong Cheah, Ming-Chuan Hung | 2022-05-03 |
| 11214868 | Chemical vapor deposition apparatus and blocker plate | Huan-Chieh Chen, Chao-Chun Wang, Chih-Yu Wu | 2022-01-04 |