Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11361943 | Adjustable fastening device for plasma gas injectors | Yung-Shun Hsu, Ching-Yu Chang, Chiao-Kai Chang, Chien-Fang Lin | 2022-06-14 |
| 11355318 | Adjustable fastening device for plasma gas injectors | Yung-Shun Hsu, Ching-Yu Chang, Chiao-Kai Chang, Chien-Fang Lin | 2022-06-07 |
| 11318506 | Apparatus for cleaning semiconductor equipment | SHIH-KUO LIU, CHIA-HSUN CHANG, Keith Kuang-Kuo Koai, Ming-Chuan Hung | 2022-05-03 |