Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11520243 | Lithography system and method thereof | Shao-Hua Wang, Kuei-Lin Ho, Zong-You YANG, Cheng-Wei Sun, Wei Chen +3 more | 2022-12-06 |
| 11520246 | Highly efficient automatic particle cleaner method for EUV systems | Shih-Yu Tu, Shao-Hua Wang, Yen-Hao LIU, Li-Jui Chen, Heng-Hsin Liu | 2022-12-06 |
| 11320733 | Reticle with conductive material structure | Hsiao-Lun Chang, Tsung-Yen Lee, Tzung-Chi Fu, Li-Jui Chen, Po-Chung Cheng +1 more | 2022-05-03 |