Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11528798 | Replacement method for droplet generator | Han-Lung Chang, Hsiao-Lun Chang, Li-Jui Chen, Po-Chung Cheng | 2022-12-13 |
| 11520246 | Highly efficient automatic particle cleaner method for EUV systems | Shao-Hua Wang, Yen-Hao LIU, Chueh-Chi Kuo, Li-Jui Chen, Heng-Hsin Liu | 2022-12-06 |