Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11528798 | Replacement method for droplet generator | Shih-Yu Tu, Han-Lung Chang, Li-Jui Chen, Po-Chung Cheng | 2022-12-13 |
| 11470710 | EUV light source and apparatus for EUV lithography | Wei-Shin Cheng, Han-Lung Chang, Li-Jui Chen, Po-Chung Cheng | 2022-10-11 |
| 11320733 | Reticle with conductive material structure | Chueh-Chi Kuo, Tsung-Yen Lee, Tzung-Chi Fu, Li-Jui Chen, Po-Chung Cheng +1 more | 2022-05-03 |