Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11452197 | Shock wave visualization for extreme ultraviolet plasma optimization | Yen-Shuo Su, Jen-Hao Yeh, Jhan-Hong YEH, Ting-Ya CHENG, Yee-Shian Henry TONG +3 more | 2022-09-20 |
| 11437161 | Lithography apparatus and method for using the same | Chieh Hsieh, Shang-Chieh Chien, Han-Lung Chang, Heng-Hsin Liu, Li-Jui Chen +1 more | 2022-09-06 |
| 11419203 | EUV radiation modification methods and systems | Jen-Hao Yeh, Tzung-Chi Fu, Bo-Tsun Liu, Li-Jui Chen, Po-Chung Cheng | 2022-08-16 |