Issued Patents 2022
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11531278 | EUV lithography system and method for decreasing debris in EUV lithography system | Chi-Ming Yang, Ssu-Yu Chen, Shang-Chieh Chien, Tzung-Chi Fu, Bo-Tsun Liu +2 more | 2022-12-20 |
| 11483918 | Light source for lithography exposure process | Shang-Chieh Chien, Chun-Chia Hsu, Bo-Tsun Liu, Tzung-Chi Fu, Li-Jui Chen +1 more | 2022-10-25 |
| 11467498 | Extreme ultraviolet control system | Jen-Yang Chung, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2022-10-11 |
| 11437161 | Lithography apparatus and method for using the same | Chun-Lin Chang, Shang-Chieh Chien, Han-Lung Chang, Heng-Hsin Liu, Li-Jui Chen +1 more | 2022-09-06 |
| 11392040 | System and method for performing extreme ultraviolet photolithography processes | Tai-Yu Chen, Sagar Deepak Khivsara, Kuo-An Liu, Shang-Chieh Chien, Gwan Sin Chang +5 more | 2022-07-19 |
| 11333983 | Light source, EUV lithography system, and method for generating EUV radiation | Chi YANG, Ssu-Yu Chen, Shang-Chieh Chien, Tzung-Chi Fu, Bo-Tsun Liu +2 more | 2022-05-17 |
| 11269257 | Apparatus and method for generating extreme ultraviolet radiation | Kuan-Hung Chen, Chun-Chia Hsu, Shang-Chieh Chien, Bo-Tsun Liu, Li-Jui Chen +1 more | 2022-03-08 |
| 11224115 | System and method for extreme ultraviolet source control | Chun-Chia Hsu, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng, Tzung-Chi Fu +1 more | 2022-01-11 |