Issued Patents 2022
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11531278 | EUV lithography system and method for decreasing debris in EUV lithography system | Chi-Ming Yang, Ssu-Yu Chen, Shang-Chieh Chien, Chieh Hsieh, Tzung-Chi Fu +2 more | 2022-12-20 |
| 11483918 | Light source for lithography exposure process | Chieh Hsieh, Shang-Chieh Chien, Chun-Chia Hsu, Tzung-Chi Fu, Li-Jui Chen +1 more | 2022-10-25 |
| 11419203 | EUV radiation modification methods and systems | Chun-Lin Chang, Jen-Hao Yeh, Tzung-Chi Fu, Li-Jui Chen, Po-Chung Cheng | 2022-08-16 |
| 11392022 | Extreme ultraviolet lithography method, extreme ultraviolet mask and formation method thereof | Chih-Tsung Shih, Yu-Hsun Wu, Tsung Chuan Lee | 2022-07-19 |
| 11333983 | Light source, EUV lithography system, and method for generating EUV radiation | Chi YANG, Ssu-Yu Chen, Shang-Chieh Chien, Chieh Hsieh, Tzung-Chi Fu +2 more | 2022-05-17 |
| 11275318 | Radiation source for lithography process | Shang-Ying WU, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng | 2022-03-15 |
| 11275301 | Extreme ultraviolet mask and method of manufacturing the same | Chih-Tsung Shih, Tsung-Chih Chien, Shih-Chi Fu, Chi-Hua FU, Kuotang CHENG +1 more | 2022-03-15 |
| 11269257 | Apparatus and method for generating extreme ultraviolet radiation | Chieh Hsieh, Kuan-Hung Chen, Chun-Chia Hsu, Shang-Chieh Chien, Li-Jui Chen +1 more | 2022-03-08 |
| 11224115 | System and method for extreme ultraviolet source control | Chun-Chia Hsu, Chieh Hsieh, Shang-Chieh Chien, Li-Jui Chen, Po-Chung Cheng +1 more | 2022-01-11 |