Issued Patents 2022
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11506985 | Semiconductor apparatus and method of operating the same for preventing photomask particulate contamination | Jui-Chieh Chen, Tsung-Chih Chien, Tsung Chuan Lee | 2022-11-22 |
| 11480869 | Photomask with enhanced contamination control and method of forming the same | Chien-Hung Lai, Hao-Ming Chang, Chia-Shih Lin, Hsuan-Wen Wang, Yu-Hsin Hsu +1 more | 2022-10-25 |
| 11448828 | Optical device for coupling light | Chan-Hong Chern, Chih-Chang Lin, Chewn-Pu Jou, Feng-Wei Kuo, Lan-Chou Cho +2 more | 2022-09-20 |
| 11424175 | Semiconductor device with heating structure | Chewn-Pu Jou, Stefan Rusu, Feng-Wei Kuo | 2022-08-23 |
| 11415879 | Reticle enclosure for lithography systems | Tsung-Chih Chien, Tsung Chuan Lee, Hao-Shiang Chang | 2022-08-16 |
| 11392022 | Extreme ultraviolet lithography method, extreme ultraviolet mask and formation method thereof | Yu-Hsun Wu, Bo-Tsun Liu, Tsung Chuan Lee | 2022-07-19 |
| 11275301 | Extreme ultraviolet mask and method of manufacturing the same | Tsung-Chih Chien, Shih-Chi Fu, Chi-Hua FU, Kuotang CHENG, Bo-Tsun Liu +1 more | 2022-03-15 |