Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11506985 | Semiconductor apparatus and method of operating the same for preventing photomask particulate contamination | Jui-Chieh Chen, Tsung-Chih Chien, Chih-Tsung Shih | 2022-11-22 |
| 11415879 | Reticle enclosure for lithography systems | Chih-Tsung Shih, Tsung-Chih Chien, Hao-Shiang Chang | 2022-08-16 |
| 11392022 | Extreme ultraviolet lithography method, extreme ultraviolet mask and formation method thereof | Chih-Tsung Shih, Yu-Hsun Wu, Bo-Tsun Liu | 2022-07-19 |
| 11275301 | Extreme ultraviolet mask and method of manufacturing the same | Chih-Tsung Shih, Tsung-Chih Chien, Shih-Chi Fu, Chi-Hua FU, Kuotang CHENG +1 more | 2022-03-15 |