Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11506985 | Semiconductor apparatus and method of operating the same for preventing photomask particulate contamination | Tsung-Chih Chien, Chih-Tsung Shih, Tsung Chuan Lee | 2022-11-22 |