Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11506985 | Semiconductor apparatus and method of operating the same for preventing photomask particulate contamination | Jui-Chieh Chen, Chih-Tsung Shih, Tsung Chuan Lee | 2022-11-22 |
| 11415879 | Reticle enclosure for lithography systems | Chih-Tsung Shih, Tsung Chuan Lee, Hao-Shiang Chang | 2022-08-16 |
| 11275301 | Extreme ultraviolet mask and method of manufacturing the same | Chih-Tsung Shih, Shih-Chi Fu, Chi-Hua FU, Kuotang CHENG, Bo-Tsun Liu +1 more | 2022-03-15 |