Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11480869 | Photomask with enhanced contamination control and method of forming the same | Chien-Hung Lai, Hao-Ming Chang, Hsuan-Wen Wang, Yu-Hsin Hsu, Chih-Tsung Shih +1 more | 2022-10-25 |
| 11440060 | Method for cleaning substrate | Hao-Ming Chang | 2022-09-13 |