Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11275318 | Radiation source for lithography process | Shang-Chieh Chien, Bo-Tsun Liu, Li-Jui Chen, Po-Chung Cheng | 2022-03-15 |
| 11272606 | EUV light source and apparatus for lithography | Shang-Chieh Chien, Po-Chung Cheng, Chia-Chen Chen, Jen-Yang Chung, Li-Jui Chen +1 more | 2022-03-08 |