Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11402761 | Semiconductor lithography system and/or method | Chi-Ming Yang, Hsu-Shui Liu | 2022-08-02 |
| 11243461 | Reflective mask and fabricating method thereof | Pei-Cheng Hsu | 2022-02-08 |