Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11537053 | Semiconductor processing tool and methods of operation | Chiao-Hua Cheng, Yu-Kuang SUN, Wei-Shin Cheng, Yu-Huan Chen, Ming-Hsun Tsai +6 more | 2022-12-27 |
| 11513441 | EUV radiation source apparatus for lithography | Yu-Chih Chen, Po-Chung Cheng, Li-Jui Chen, Shang-Chieh Chien, Wei-Chun Yen | 2022-11-29 |
| 11380566 | System for a semiconductor fabrication facility and method for operating the same | Fu-Hsien Li, Chi-Feng Tung, Hsiang Yin Shen, Guancyun Li | 2022-07-05 |
| 11243479 | Method of operating semiconductor apparatus and semiconductor apparatus | Hsiang Chen, Shang-Chieh Chien, Li-Jui Chen | 2022-02-08 |
| 11225837 | Dual-speed dual—core enhanced drilling equipment | Liexiang Han, Zuo Chen, Bin LIU, Xiaofeng YANG, Jianlin Yao +10 more | 2022-01-18 |