Issued Patents 2022
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11537053 | Semiconductor processing tool and methods of operation | Chiao-Hua Cheng, Yu-Kuang SUN, Wei-Shin Cheng, Yu-Huan Chen, Cheng-Hao LAI +6 more | 2022-12-27 |
| 11533799 | System and method for supplying target material in an EUV light source | Hsin-Feng Chen, Li-Jui Chen, Shang-Chieh Chien, Heng-Hsin Liu, Cheng-Hao LAI +6 more | 2022-12-20 |
| 11528797 | Method and system for generating droplets for EUV photolithography processes | Yu-Kuang SUN, Cheng-Hao LAI, Yu-Huan Chen, Wei-Shin Cheng, Hsin-Feng Chen +6 more | 2022-12-13 |
| 11442365 | EUV photolithography system and methods of operating the same | Yu-Kuang SUN, Yu-Huan Chen, Wei-Shin Cheng, Cheng-Hao LAI, Hsin-Feng Chen +6 more | 2022-09-13 |
| 11392041 | Particle removal device and method | Cheng-Hsuan Wu, Shang-Chieh Chien, Li-Jui Chen, Heng-Hsin Liu | 2022-07-19 |
| 11275317 | Droplet generator and method of servicing a photolithographic tool | Yu-Huan Chen, Cheng-Hsuan Wu, Shang-Chieh Chien, Li-Jui Chen | 2022-03-15 |