Issued Patents 2022
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11537053 | Semiconductor processing tool and methods of operation | Chiao-Hua Cheng, Yu-Kuang SUN, Wei-Shin Cheng, Yu-Huan Chen, Ming-Hsun Tsai +6 more | 2022-12-27 |
| 11533799 | System and method for supplying target material in an EUV light source | Hsin-Feng Chen, Ming-Hsun Tsai, Li-Jui Chen, Shang-Chieh Chien, Heng-Hsin Liu +6 more | 2022-12-20 |
| 11528797 | Method and system for generating droplets for EUV photolithography processes | Yu-Kuang SUN, Cheng-Hao LAI, Yu-Huan Chen, Wei-Shin Cheng, Ming-Hsun Tsai +6 more | 2022-12-13 |
| 11442365 | EUV photolithography system and methods of operating the same | Yu-Kuang SUN, Ming-Hsun Tsai, Yu-Huan Chen, Wei-Shin Cheng, Cheng-Hao LAI +6 more | 2022-09-13 |
| 11392041 | Particle removal device and method | Ming-Hsun Tsai, Shang-Chieh Chien, Li-Jui Chen, Heng-Hsin Liu | 2022-07-19 |
| 11300727 | Optical communication package structure and method for manufacturing the same | Yung-Hui Wang | 2022-04-12 |
| 11275317 | Droplet generator and method of servicing a photolithographic tool | Yu-Huan Chen, Ming-Hsun Tsai, Shang-Chieh Chien, Li-Jui Chen | 2022-03-15 |