Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11513444 | Noise reduction for overlay control | Weimin Hu, Yang-Hung Chang, Chun-Ming Hu, Chih-Ming Ke | 2022-11-29 |
| 11294293 | Overlay marks for reducing effect of bottom layer asymmetry | Hung-Chih Hsieh, Po-Chung Cheng | 2022-04-05 |