Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11513444 | Noise reduction for overlay control | Weimin Hu, Yang-Hung Chang, Kai-Hsiung Chen, Chih-Ming Ke | 2022-11-29 |
| 11287746 | System and method for overlay error reduction | Hung-Chung Chien, Hao-Ken HUNG, Chih-Chieh Yang, Ming-Feng Shieh | 2022-03-29 |