| 11532462 |
Method and system for cleaning a process chamber |
Kalyanjit Ghosh, Shailendra Srivastava, Tejas Ulavi, Yusheng Zhou, Amit Kumar BANSAL |
2022-12-20 |
| 11520358 |
Gas-pulsing-based shared precursor distribution system and methods of use |
Michael R. Rice, Joseph AuBuchon, Ashley M. Okada, Alexander Fernandez, Ming Xu +4 more |
2022-12-06 |
| 11512391 |
Process kit for a high throughput processing chamber |
Kalyanjit Ghosh, Mayur Govind Kulkarni, Kien N. Chuc, Sungjin Kim, Yanjie Wang |
2022-11-29 |
| 11508611 |
Enhanced lift pin design to eliminate local thickness non-uniformity in teos oxide films |
Kalyanjit Ghosh, Mayur Govind Kulkarni, Praket P. Jha, Krishna Nittala |
2022-11-22 |
| 11501957 |
Pedestal support design for precise chamber matching and process control |
Gopu Krishna, Alexander S. Polyak |
2022-11-15 |
| 11479855 |
Spatial wafer processing with improved temperature uniformity |
Joseph AuBuchon, Dhritiman Subha Kashyap, Jared Ahmad Lee, Tejas Ulavi, Michael R. Rice |
2022-10-25 |
| 11479857 |
Clean isolation valve for reduced dead volume |
Ashutosh Agarwal |
2022-10-25 |
| 11434569 |
Ground path systems for providing a shorter and symmetrical ground path |
Tuan Nguyen, Jason M. Schaller, Edward P. Hammond, IV, David Blahnik, Tejas Ulavi +3 more |
2022-09-06 |
| 11430686 |
Pedestal heater for spatial multi-wafer processing tool |
Tejas Ulavi, Dhritiman Subha Kashyap |
2022-08-30 |
| 11396703 |
Apparatus and methods for improving chemical utilization rate in deposition process |
Kevin Griffin, Joseph AuBuchon, Mario David Silvetti, Hari Ponnekanti |
2022-07-26 |
| 11332827 |
Gas distribution plate with high aspect ratio holes and a high hole density |
Sumit Agarwal, Chad Peterson, Michael R. Rice |
2022-05-17 |
| 11293099 |
Showerhead assembly with multiple fluid delivery zones |
Amit Kumar BANSAL, Juan Carlos Rocha-Alvarez, Sam Kim, Tuan Nguyen |
2022-04-05 |
| 11282676 |
Paired dynamic parallel plate capacitively coupled plasmas |
Hari Ponnekanti, Tsutomu Tanaka, Mandyam Sriram, Dmitry A. Dzilno, Mario David Silvetti |
2022-03-22 |
| 11260432 |
In-situ DC plasma for cleaning pedestal heater |
Tejas Ulavi, Arkaprava Dan, Wei V. Tang |
2022-03-01 |
| 11220747 |
Complementary pattern station designs |
Joseph AuBuchon, Michael R. Rice, Arkaprava Dan, Hanhong Chen |
2022-01-11 |
