Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11430680 | Position and temperature monitoring of ALD platen susceptor | Abraham Ravid, Kevin Griffin, Joseph Yudovsky, Kaushal Gangakhedkar, Alex Minkovich | 2022-08-30 |
| 11315763 | Shaped electrodes for improved plasma exposure from vertical plasma source | Kallol Bera, Anantha K. Subramani, John C. Forster, Tsutomu Tanaka | 2022-04-26 |
| 11282676 | Paired dynamic parallel plate capacitively coupled plasmas | Hari Ponnekanti, Tsutomu Tanaka, Mandyam Sriram, Sanjeev Baluja, Mario David Silvetti | 2022-03-22 |