Issued Patents 2022
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11530480 | Injector for batch processing and methods of use | Joseph Yudovsky, Mandyam Sriram | 2022-12-20 |
| 11430680 | Position and temperature monitoring of ALD platen susceptor | Abraham Ravid, Joseph Yudovsky, Kaushal Gangakhedkar, Dmitry A. Dzilno, Alex Minkovich | 2022-08-30 |
| 11396703 | Apparatus and methods for improving chemical utilization rate in deposition process | Sanjeev Baluja, Joseph AuBuchon, Mario David Silvetti, Hari Ponnekanti | 2022-07-26 |
| 11332828 | Gas distribution assembly mounting for fragile plates to prevent breakage | Guangwei Sun | 2022-05-17 |
| 11261525 | Injector for batch processing and methods of use | Joseph Yudovsky, Mandyam Sriram | 2022-03-01 |
| 11230763 | Gas separation control in spatial atomic layer deposition | Ning Li, Steven Marcus, Tai T. Ngo | 2022-01-25 |