Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11396703 | Apparatus and methods for improving chemical utilization rate in deposition process | Kevin Griffin, Sanjeev Baluja, Joseph AuBuchon, Hari Ponnekanti | 2022-07-26 |
| 11282676 | Paired dynamic parallel plate capacitively coupled plasmas | Hari Ponnekanti, Tsutomu Tanaka, Mandyam Sriram, Dmitry A. Dzilno, Sanjeev Baluja | 2022-03-22 |