Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11530480 | Injector for batch processing and methods of use | Joseph Yudovsky, Kevin Griffin | 2022-12-20 |
| 11515144 | In-situ film annealing with spatial atomic layer deposition | Keiichi Tanaka, Andrew Short, Srinivas Gandikota | 2022-11-29 |
| 11282676 | Paired dynamic parallel plate capacitively coupled plasmas | Hari Ponnekanti, Tsutomu Tanaka, Dmitry A. Dzilno, Sanjeev Baluja, Mario David Silvetti | 2022-03-22 |
| 11261525 | Injector for batch processing and methods of use | Joseph Yudovsky, Kevin Griffin | 2022-03-01 |