Issued Patents 2022
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11515144 | In-situ film annealing with spatial atomic layer deposition | Keiichi Tanaka, Andrew Short, Mandyam Sriram | 2022-11-29 |
| 11515207 | Methods of forming metal chalcogenide pillars | Amrita B. Mullick | 2022-11-29 |
| 11488856 | Methods for gapfill in high aspect ratio structures | Pramit Manna, Ludovic Godet, Rui Cheng, Erica Chen, Ziqing Duan +1 more | 2022-11-01 |
| 11476267 | Liner for V-NAND word line stack | Jacqueline S. Wrench, Yixiong Yang, Yong Wu, Wei V. Tang, Yongjing Lin +2 more | 2022-10-18 |
| 11462438 | Volumetric expansion of metal-containing films by silicidation | Susmit Singha Roy, Abhijit Basu Mallick, Amrita B. Mullick | 2022-10-04 |
| 11447866 | High temperature chemical vapor deposition lid | Muhannad Mustafa, Muhammad M. Rasheed, Mario D. Sanchez, Wei V. Tang | 2022-09-20 |
| 11437271 | Seamless gap fill | Yixiong Yang, Wei Liu | 2022-09-06 |
| 11414751 | Self-aligned structures from sub-oxides | Susmit Singha Roy, Abhijit Basu Mallick | 2022-08-16 |
| 11417517 | Treatments to enhance material structures | Yixiong Yang, Jacqueline S. Wrench, Yong Yang, Steven C. H. Hung | 2022-08-16 |
| 11384432 | Atomic layer deposition chamber with funnel-shaped gas dispersion channel and gas distribution plate | Muhammad M. Rasheed, Mario D. Sanchez, Guoqiang Jian, Yixiong Yang, Deepak Jadhav +1 more | 2022-07-12 |
| 11359282 | Methods for forming impurity free metal alloy films | Geetika Bajaj, Darshan Thakare, Prerna Goradia, Robert Jan Visser, Yixiong Yang +1 more | 2022-06-14 |
| 11328928 | Conformal high concentration boron doping of semiconductors | Abhijit Basu Mallick, Swaminathan Srinivasan, Rui Cheng, Susmit Singha Roy, Gaurav Thareja +2 more | 2022-05-10 |
| 11315943 | Bottom-up approach to high aspect ratio hole formation in 3D memory structures | Praburam Gopalraja, Susmit Singha Roy, Abhijit Basu Mallick | 2022-04-26 |
| 11289579 | P-type dipole for p-FET | Yongjing Lin, Karla M Bernal Ramos, Shih Chung Chen, Yixiong Yang, Lin Dong +1 more | 2022-03-29 |
| 11289374 | Nucleation-free gap fill ALD process | Yihong Chen, Kelvin Chan, Xinliang Lu, Yong Wu, Susmit Singha Roy +1 more | 2022-03-29 |
| 11245022 | Integrated dipole flow for transistor | Yongjing Lin, Karla M Bernal Ramos, Luping Li, Shih Chung Chen, Jacqueline S. Wrench +4 more | 2022-02-08 |
| 11244824 | Conformal doped amorphous silicon as nucleation layer for metal deposition | Rui Cheng, Yihong Chen, Yong Wu, Abhijit Basu Mallick | 2022-02-08 |
| 11232955 | Methods of etching metal oxides with less etch residue | Amrita B. Mullick, Abhijit Basu Mallick, Susmit Singha Roy, Yingli Rao, Regina Freed +1 more | 2022-01-25 |