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Oxygen free deposition of platinum group metal films |
Wei V. Tang, Seshadri Ganguli, Sang Ho Yu, Feng Q. Liu, Jeffrey W. Anthis +3 more |
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| 11476267 |
Liner for V-NAND word line stack |
Jacqueline S. Wrench, Yong Wu, Wei V. Tang, Srinivas Gandikota, Yongjing Lin +2 more |
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| 11437271 |
Seamless gap fill |
Srinivas Gandikota, Wei Liu |
2022-09-06 |
| 11417517 |
Treatments to enhance material structures |
Srinivas Gandikota, Jacqueline S. Wrench, Yong Yang, Steven C. H. Hung |
2022-08-16 |
| 11384432 |
Atomic layer deposition chamber with funnel-shaped gas dispersion channel and gas distribution plate |
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| 11359282 |
Methods for forming impurity free metal alloy films |
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| 11335591 |
Thermal process chamber lid with backside pumping |
Anqing Cui, Dien-Yeh Wu, Wei V. Tang, Bo Wang |
2022-05-17 |
| 11289579 |
P-type dipole for p-FET |
Yongjing Lin, Karla M Bernal Ramos, Shih Chung Chen, Lin Dong, Steven C. H. Hung +1 more |
2022-03-29 |
| 11245022 |
Integrated dipole flow for transistor |
Yongjing Lin, Karla M Bernal Ramos, Luping Li, Shih Chung Chen, Jacqueline S. Wrench +4 more |
2022-02-08 |
