Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11515218 | Thermal profile monitoring wafer and methods of monitoring temperature | — | 2022-11-29 |
| 11384432 | Atomic layer deposition chamber with funnel-shaped gas dispersion channel and gas distribution plate | Muhammad M. Rasheed, Srinivas Gandikota, Mario D. Sanchez, Guoqiang Jian, Yixiong Yang +1 more | 2022-07-12 |