Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11384432 | Atomic layer deposition chamber with funnel-shaped gas dispersion channel and gas distribution plate | Muhammad M. Rasheed, Srinivas Gandikota, Mario D. Sanchez, Yixiong Yang, Deepak Jadhav +1 more | 2022-07-12 |
| 11355391 | Method for forming a metal gapfill | Xi Cen, Feiyue Ma, Kai Wu, Yu Lei, Kazuya Daito +13 more | 2022-06-07 |