Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11401602 | Catalyst enhanced seamless ruthenium gap fill | Byunghoon Yoon, Seshadri Ganguli | 2022-08-02 |
| 11380536 | Multi-step pre-clean for selective metal gap fill | Yakuan Yao, Yiming Lai, Kai Wu, Avgerinos V. Gelatos, David T. Or +8 more | 2022-07-05 |
| 11355391 | Method for forming a metal gapfill | Feiyue Ma, Kai Wu, Yu Lei, Kazuya Daito, Yi Xu +13 more | 2022-06-07 |