Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11401602 | Catalyst enhanced seamless ruthenium gap fill | Seshadri Ganguli, Xi Cen | 2022-08-02 |
| 11286556 | Selective deposition of titanium films | Wei-Sheng Lei, Sang Ho Yu | 2022-03-29 |