Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11488830 | Oxygen free deposition of platinum group metal films | Yixiong Yang, Wei V. Tang, Sang Ho Yu, Feng Q. Liu, Jeffrey W. Anthis +3 more | 2022-11-01 |
| 11401602 | Catalyst enhanced seamless ruthenium gap fill | Byunghoon Yoon, Xi Cen | 2022-08-02 |
| 11384429 | Selective cobalt deposition on copper surfaces | Sang Ho Yu, Kevin Moraes, Hua Chung, See-Eng Phan | 2022-07-12 |
| 11282745 | Methods for filling features with ruthenium | Sang Ho Yu | 2022-03-22 |