Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11488830 | Oxygen free deposition of platinum group metal films | Yixiong Yang, Wei V. Tang, Seshadri Ganguli, Sang Ho Yu, Feng Q. Liu +3 more | 2022-11-01 |
| 11396698 | ALD process for NiO film with tunable carbon content | Ghazal Saheli, Feng Q. Liu, David Thompson | 2022-07-26 |
| 11332488 | Metal precursors with modified diazabutadiene ligands for CVD and ALD and methods of use | Atashi Basu, David Thompson, Nasrin Kazem | 2022-05-17 |
| 11293093 | Water assisted highly pure ruthenium thin film deposition | Feng Q. Liu, Feng Chen, David Thompson, Mei Chang | 2022-04-05 |