Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11332488 | Metal precursors with modified diazabutadiene ligands for CVD and ALD and methods of use | Jeffrey W. Anthis, Atashi Basu, David Thompson | 2022-05-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11332488 | Metal precursors with modified diazabutadiene ligands for CVD and ALD and methods of use | Jeffrey W. Anthis, Atashi Basu, David Thompson | 2022-05-17 |