Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11293093 | Water assisted highly pure ruthenium thin film deposition | Feng Q. Liu, Feng Chen, Jeffrey W. Anthis, David Thompson | 2022-04-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11293093 | Water assisted highly pure ruthenium thin film deposition | Feng Q. Liu, Feng Chen, Jeffrey W. Anthis, David Thompson | 2022-04-05 |