Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11488830 | Oxygen free deposition of platinum group metal films | Yixiong Yang, Wei V. Tang, Seshadri Ganguli, Feng Q. Liu, Jeffrey W. Anthis +3 more | 2022-11-01 |
| 11421318 | Methods and apparatus for high reflectivity aluminum layers | Jacqueline S. Wrench, Liqi Wu, Hsiang-Ning Wu, Paul F. Ma, Fuqun Grace Vasiknanonte +1 more | 2022-08-23 |
| 11384429 | Selective cobalt deposition on copper surfaces | Kevin Moraes, Seshadri Ganguli, Hua Chung, See-Eng Phan | 2022-07-12 |
| 11286556 | Selective deposition of titanium films | Byunghoon Yoon, Wei-Sheng Lei | 2022-03-29 |
| 11282745 | Methods for filling features with ruthenium | Seshadri Ganguli | 2022-03-22 |