Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11488830 | Oxygen free deposition of platinum group metal films | Yixiong Yang, Seshadri Ganguli, Sang Ho Yu, Feng Q. Liu, Jeffrey W. Anthis +3 more | 2022-11-01 |
| 11476267 | Liner for V-NAND word line stack | Jacqueline S. Wrench, Yixiong Yang, Yong Wu, Srinivas Gandikota, Yongjing Lin +2 more | 2022-10-18 |
| 11447866 | High temperature chemical vapor deposition lid | Muhannad Mustafa, Muhammad M. Rasheed, Mario D. Sanchez, Srinivas Gandikota | 2022-09-20 |
| 11335591 | Thermal process chamber lid with backside pumping | Anqing Cui, Dien-Yeh Wu, Yixiong Yang, Bo Wang | 2022-05-17 |
| 11260432 | In-situ DC plasma for cleaning pedestal heater | Tejas Ulavi, Arkaprava Dan, Sanjeev Baluja | 2022-03-01 |