Issued Patents 2022
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11495932 | Slip ring for use in rotatable substrate support | Yu Chang, William Kuang, Muhammad M. Rasheed, Xiping Huo | 2022-11-08 |
| 11479859 | High temperature vacuum seal | Muhammad M. Rasheed | 2022-10-25 |
| 11447866 | High temperature chemical vapor deposition lid | Muhammad M. Rasheed, Mario D. Sanchez, Srinivas Gandikota, Wei V. Tang | 2022-09-20 |
| 11427912 | High temperature rotation module for a processing chamber | Muhammad M. Rasheed | 2022-08-30 |
| 11420217 | Showerhead for ALD precursor delivery | Muhammad M. Rasheed | 2022-08-23 |
| 11415147 | Pumping liner for improved flow uniformity | Muhammad M. Rasheed, Mario D. Sanchez | 2022-08-16 |
| 11408530 | Valve for varying flow conductance under vacuum | Muhammad M. Rasheed | 2022-08-09 |
| D959516 | Compression fitting | Muhammad M. Rasheed | 2022-08-02 |
| 11387134 | Process kit for a substrate support | Muhammad M. Rasheed, Yu Lei, Avgerinos V. Gelatos, Vikash Banthia, Victor H Calderon +3 more | 2022-07-12 |
| 11236424 | Process kit for improving edge film thickness uniformity on a substrate | Muhammad M. Rasheed | 2022-02-01 |